Semiconductor package

ABSTRACT

A semiconductor package includes a substrate, a first passivation layer disposed on the substrate, and an under bump metallurgy layer disposed on the first passivation layer. An additional under bump metallurgy layer is disposed on the first passivation layer, isolated from the under bump metallurgy layer; and a conductive pillar disposed on the additional under bump metallurgy layer.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.14/663,755, filed on Mar. 20, 2015 (now U.S. Pat. No. 9,209,148), whichis a continuation of U.S. patent application Ser. No. 13/109,740, filedon May 17, 2011 (now U.S. Pat. No. 8,987,897, issued on May 24, 2012),which claims the benefit of U.S. Provisional Application No. 61/416,924,filed on Nov. 24, 2010, the entireties of which are incorporated byreference herein.

BACKGROUND OF THE INVENTION

Field of the Invention

The present invention relates to a semiconductor package, and inparticular, to a passive device of semiconductor package.

Description of the Related Art

For the conventional flip chip package, one criterion of inductors islow resistance, so that a high quality factor (Q factor) can beachieved. The quality factor (Q factor) of an inductor is the ratio ofits inductive reactance to its resistance at a given frequency, and is ameasure of its efficiency. The higher the Q factor of the inductor, thecloser it approaches the behavior of an ideal, lossless, inductor.

The conventional flip chip package fabrication process usually usesadditional metal layers of an interconnection structure of a chip toimprove the quality factor (Q factor). However, the additional metallayers will increase fabrication costs and negatively affect fabricationthroughput.

Thus, a novel inductor with an increased Q factor is desirable.

BRIEF SUMMARY OF INVENTION

A semiconductor package is provided. An exemplary embodiment of asemiconductor package includes a substrate. A first passivation layer isdisposed on the substrate. An under bump metallurgy layer is disposed onthe first passivation layer. A passive device is disposed on the underbump metallurgy layer.

Another exemplary embodiment of a semiconductor package includes anunder bump metallurgy layer, disposed on a substrate. A passive deviceis disposed on the under bump metallurgy layer. A solder is disposed onthe passive device.

A detailed description is given in the following embodiments withreference to the accompanying drawings.

BRIEF DESCRIPTION OF DRAWINGS

The invention can be more fully understood by reading the subsequentdetailed description and examples with references made to theaccompanying drawings, wherein:

FIGS. 1-9 are cross section views for fabricating one exemplaryembodiment of a semiconductor package of the invention.

FIG. 10 is a perspective view of one exemplary embodiment of a passivedevice of a semiconductor package of the invention.

DETAILED DESCRIPTION OF INVENTION

The following description is a mode for carrying out the invention. Thisdescription is made for the purpose of illustrating the generalprinciples of the invention and should not be taken in a limiting sense.The scope of the invention is best determined by reference to theappended claims. Wherever possible, the same reference numbers are usedin the drawings and the descriptions to refer the same or like parts.

The present invention will be described with respect to particularembodiments and with reference to certain drawings, but the invention isnot limited thereto and is only limited by the claims. The drawingsdescribed are only schematic and are non-limiting. In the drawings, thesize of some of the elements may be exaggerated and not drawn to scalefor illustrative purposes. The dimensions and the relative dimensions donot correspond to actual dimensions to practice of the invention.

FIGS. 1-9 are cross section views for fabricating one exemplaryembodiment of a semiconductor package 500 of the invention. Oneexemplary embodiment of a semiconductor package 500 is a flip chippackage. One exemplary embodiment of a semiconductor package 500comprises a passive device integrated with a conductive pillar, which isdisposed between a metal pad and a conductive bump, of a bump structure,so that the passive device may have a thickness much thicker than aconventional passive device disposed in the interconnection structurewithout additional metal layers. If the passive device is an inductor,the passive device has reduced resistance and a high quality factor (Qfactor).

Referring to FIG. 1, firstly, a semiconductor chip 300 is provided. Inone embodiment, the semiconductor chip 300 comprises a substrate 200with a semiconductor device 202 disposed thereon. An interconnectionstructure 220 is formed on the substrate 200 and the semiconductordevice 202. In one embodiment, the interconnection structure 220 mayprovide electrical transmitting paths for the semiconductor device 202.In one embodiment, the interconnection structure 220 may comprise aplurality of metal layers, a plurality of dielectric layersalternatively laminated with the metal layers and a plurality of viasformed through the dielectric layers on the substrate 200. For example,the metal layers of the interconnection structure 220 may comprise themetal layers 208, 214 and metal pads 224 a and 224 b. Also, the metalpads 224 a and 224 b belong to the uppermost metal layer of the metallayers of the interconnection structure 220. In this embodiment, themetal pad 224 a is used to transmit input/output (I/O), ground or powersignals of the semiconductor chip 300, and the metal pad 224 b is usedto transmit power signals to a subsequent passive device formed thereon.For example, the dielectric layers of the interconnection structure 220may comprise the dielectric layers 206, 212, 216 and the passivationlayer 222. Also, the passivation layer 222 belongs to the uppermostdielectric layer of the dielectric layers of the interconnectionstructure 220.

Next, still referring to FIG. 1, a bump process is performed on thesemiconductor chip 300. A passivation layer 226 is conformably formedcovering the metal pads 224 a and 224 b by a deposition method. In oneembodiment, the passivation layers 222 and 226 may comprise oxide,nitride, or oxynitride. Next, the passivation layer 226 is patterned torespectively formed openings 227 a and 227 b on the metal pads 224 a and224 b, so that a portion of the metal pads 224 a and 224 b arerespectively exposed from the openings 227 a and 227 b.

Next, still referring to FIG. 1, a passivation layer 228 is entirelyformed by a coating method. In one embodiment, the passivation layer 228may comprise polyimide for providing reliable insulation when thesemiconductor chip 300 is subjected to various types of environmentalstresses.

Next, referring to FIG. 2, portions of the passivation layer 228 areremoved by a patterning process comprising a photolithography and adevelop process to form openings 230 a and 230 b over the openings 227 aand 227 b, respectively. Therefore, a portion of the metal pads 224 aand 224 b are respectively exposed from the openings 230 a and 230 b.

Next, referring to FIG. 3, the passivation layer 228 as shown in FIG. 2is subjected a curing process to solidify the passivation layer 228.After the curing process, the level of the passivation layer 228 maydrop to form a cured passivation layer 228 a as a result of shrinkage ofthe passivation layer.

Next, referring to FIG. 4, an under bump metallurgy (UBM) layer 232 isformed on the cured passivation layer 228 a by a deposition method suchas a sputtering or plating method. Meanwhile, the UBM layer 232 lines asidewall and a bottom surface of the openings 230 a and 230 b. Also, theUBM layer 232 extends over a top surface of the cured passivation layer228 a. In one embodiment, the UBM layer 232 is composed of a Ti layerand a Cu layer on the Ti layer.

FIGS. 5-8 show formation of a passive device and a conductive pillar onthe UBM layer 232. Next, referring to FIG. 5, a dry film photoresist 234is entirely laminated on the UBM layer 232. Alternatively, a liquidphotoresist can be used to replace the dry film photoresist 234. Next,the dry film photoresist 234 is patterned by a photolithography processcomprising an exposure step and a development step to form openings 236a and 236 b respectively over the metal pads 224 a and 224 b, so thatformation positions of the subsequent passive device and the conductivepillar are defined. In one embodiment, the dry film photoresist 234 mayhave a thickness of between about 20 μm and 40 μm.

Next, referring to FIG. 6, conductive buffer layers 237 a and 237 b arerespectively formed on bottom surfaces of the openings 234 a and 234 bby an electroplating method. In one embodiment, the conductive bufferlayers 237 a and 237 b may serve as a seed layer, an adhesion layer anda barrier layer for a conductive pillar or a passive device formedthereon. In one embodiment, the conductive buffer layers 237 a and 237 bmay comprise Ni. Then, the conductive pillar 238 a and the passivedevice 238 b are respectively formed on the conductive buffer layers 237a and 237 b, filling the openings 236 a and 236 b. In one embodiment,the conductive pillar 238 a is used as a solder joint for a subsequentconductive bump, which is used to transmit input/output (I/O), ground orpower signals of the semiconductor chip 300, formed thereon. Therefore,the conductive pillar 238 a may help to increase the mechanical strengthof the bump structure. In one embodiment, the conductive pillar 238 amay be formed of copper, so that deformation may be prevented during asubsequent solder re-flow process. A passive device of the semiconductorpackage, for example, an inductor, a transformer, a routing or anantenna, can be also formed at the same level with the conductive pillar238 a. In one embodiment, the passive device 238 b may be thick (definedby the dry film photoresist 234) and have a robust structure, especiallyfor forming an inductor.

Next, referring to FIG. 7, the dry film photoresist 234 is removed by astripping process such as a wet etching process using a suitableetchant. After the stripping process, the UBM layer 232 not covered bythe conductive pillar 238 a and the passive device 238 b is exposed.

Next, referring to FIG. 8, an anisotropic etching process is performedto remove the UBM layer 232 not covered by the conductive pillar 238 aand the passive device 238 b, thereby forming UBM layer patterns 232 aand 232 b under the conductive pillar 238 a and the passive device 238b, respectively. After performing the process as shown in FIG. 8, thepassive device 238 b of the semiconductor package is completely formed,wherein the UBM layer pattern 232 b fully overlaps with the passivedevice 238 b. It is noted that the metal pad 224 b is only used totransmit power signals to the passive device 238 b formed thereon, sothat the metal pad 224 b partially, but not fully overlaps with thepassive device 238 b.

Next, referring to FIG. 9, a conductive buffer layer 240 is formed onthe conductive pillar 238 a by an electroplating method. In oneembodiment, the conductive buffer layer 240 is an optional elementserving as a seed layer, an adhesion layer and a barrier layer for asubsequent conductive bump formed thereon. In one embodiment, theconductive buffer layer 240 may comprise Ni.

Next, a solder is formed on the conductive buffer layer 240 byelectroplating with a patterned photoresist layer or by a screenprinting process. Next, the patterned photoresist layer is removed and asolder re-flow process is performed to form a conductive bump 242 on theconductive pillar 238 a. In one embodiment of the invention, theconductive bump 242 is used to transmit input/output (I/O), ground orpower signals of the semiconductor device 202. In one embodiment of theinvention, the conductive pillar 238 a, the overlying conductive bump242 and the conductive buffer layer 240 (optional) therebetween,collectively form a bump structure 250. Alternatively, a conductivebuffer layer or the solder may be additional formed on the passivedevice 238 b, wherein the conductive bump and the solder are at the samelevel. After the aforementioned processes, one exemplary embodiment of asemiconductor package 500 is completely formed.

Additionally, the semiconductor package 500 can bond to a print circuitboard 248 as shown in FIG. 9. In one embodiment, an underfill material244 may optionally fill a space between the semiconductor package 500and the print circuit board 248. It is noted that the conductive bump242 of the semiconductor package 500 bonds to a metal pad 246 of a printcircuit board 248 disposed over the conductive bump 242 and the passivedevice of the semiconductor package 500.

One exemplary embodiment of a semiconductor package 500 provides apassive device 238 b disposed at the same level with the bump structure250 between the conductive pad 224 b of the semiconductor package 500and the metal pad 246 of a print circuit board 248. As shown in FIG. 9,the passive device 238 b, for example, an inductor, has two terminals,wherein each of the two terminals may connect to the metal pad of thesemiconductor package 500 or the metal pad of a print circuit board 248.In one embodiment, the two terminals of the passive device 238 b mayrespectively connect to two different metal pads (for example as shownin FIG. 10, two terminals of the passive device 238 b 1 respectivelyconnect to two different metal pads 224 b 1 and 224 b 2) disposed on thetop of the interconnection structure 220 of the semiconductor package500. In another embodiment, one terminal of the passive device 238 b mayconnect to the metal pad 224 b disposed on the top of theinterconnection structure 220 of the semiconductor package 500 and theother terminal of the passive device 238 b may connect to a metal pad(not shown) of the print circuit board 248 disposed over the passivedevice 238 b. In yet another embodiment, the two terminals of thepassive device 238 b may respectively connect to different metal pads(not shown) of a print circuit board disposed over the passive device.

FIG. 10 is a perspective view of one exemplary embodiment of a passivedevice 238 b 1 of a semiconductor package of the invention. In oneembodiment as shown in FIG. 10, if the passive device 238 b 1 is aninductor, the two terminals of the passive device 238 b 1 respectivelyconnect to two different metal pads 224 b 1 and 224 b 2 disposed on thetop of the interconnection structure of the semiconductor package, forexample. If the passive device 238 b 1, for example, an inductor, has aplurality of turns arranged at the same level, the passive device 238 b1 may comprise a connecting segment 224 b 3 crossing with a portion 238c of the passive device 238 b 1 but not directly connected to theportion 238 c. In one embodiment, the connecting segment 224 b 3 may beformed by an uppermost metal layer (at the same level with the metalpads 224 b 1 and 224 b 2 of the metal layers of the interconnectionstructure) to avoid shorts.

TABLE 1 Electrical performance comparison results between theconventional on-chip inductor and one exemplary embodiment of a passivedevice of the invention. 4 GHz VCO(voltage controlled oscillator)Frequency Area L(nH)@4 GHz Q@4 GHz Qpeak @ Qpeak Rout/W/S/N (μm × μm)conventional 2.146 21.81 22.75 5.0 180/25/3/2 360 × 410 on-chip inductorpassive 2.187 49.69 50.15 4.5 220/20/20/2 440 × 490 device of asemiconductor package 500 6.6 GHz VCO(voltage controlled oscillator)Frequency Area L(nH)@6.6 GHz Q@6.6 GHz Qpeak @ Qpeak Rout/W/S/N (μm ×μm) conventional 1.029 19.5 22.25 9 110/20/3/2 220 × 250 on-chipinductor passive 0.955 43.3 47.77 8.4 180/20/20/2 360 × 410 device of asemiconductor package 500 8 GHz VCO(voltage controlled oscillator)Frequency Area L(nH)@8 GHz Q@8 GHz Qpeak @ Qpeak Rout/W/S/N (μm × μm)conventional 0.514 27.27 27.85 9.5 150/30/3/1 300 × 455 on-chip inductorpassive 0.498 72.00 72.40 8.4 180/30/20/1 360 × 410 device of asemiconductor package 500

Table 1 shows electrical performance comparison results between theconventional on-chip inductor and one exemplary embodiment of aninductor of the invention (“package inductor” for short hereinafter).The conventional on-chip inductor is designed at a level of a metal pad(the uppermost metal layer) of an interconnection structure of asemiconductor package. The package inductor is designed at a levelbetween a metal pad and a conductive bump of a semiconductor package. Athickness of the package inductor (about 30 μm) is much thicker thanthat of the conventional on-chip inductor (about 2.8 μm). The qualityfactor (Q factor) (Q=ωL/R, where L is inductance, R is resistance, and wis the angular velocity in radians per second) of the package inductoris increased because resistance of the passive device is decreased. Asshown in Table 1, when the conventional on-chip inductor and the packageinductor are used for 4 GHz, 6.6 GHz and 8 GHz VCOs (voltage controlledoscillator), the package inductor dramatically improves performance ofthe Q factor (>40) over the conventional on-chip inductor.

One exemplary embodiment of a passive device of a semiconductor package500 has the following advantages. The passive device may be formed atthe same level with the conductive pillar, which is disposed between ametal pad and a conductive bump, of the bump structure withoutadditional metal layers. Thus, fabrication costs can be reduced. Thepassive device may have a thickness that is much thicker than aconventional passive device disposed in the interconnection structure.If the passive device is an inductor, the passive device has reducedresistance and a high quality factor (Q factor). Additionally, thepassive device may be formed of copper, so that deformation may beprevented during a subsequent solder re-flow process. Moreover, a layerlevel of the passive device may have a wider design rule because an areaof the passive device is not limited by arrangements of the metal layersand vias of the interconnection structure.

While the invention has been described by way of example and in terms ofthe preferred embodiments, it is to be understood that the invention isnot limited to the disclosed embodiments. To the contrary, it isintended to cover various modifications and similar arrangements (aswould be apparent to those skilled in the art). Therefore, the scope ofthe appended claims should be accorded the broadest interpretation so asto encompass all such modifications and similar arrangements.

What is claimed is:
 1. A semiconductor package, comprising: a substrate;a first passivation layer disposed on the substrate; an under bumpmetallurgy layer disposed on the first passivation layer; an additionalunder bump metallurgy layer disposed on the first passivation layer,isolated from the under bump metallurgy layer; a conductive pillardisposed on the additional under bump metallurgy layer; a passive deviceseparated from the conductive pillar and disposed on the under bumpmetallurgy layer; an interconnection structure between the substrate andthe first passivation layer, wherein the interconnection structurecomprises a plurality of metal layers and a plurality of dielectriclayers, wherein the interconnection structure comprises a metal padformed by an uppermost metal layer of the metal layers of theinterconnection structure; a second passivation layer between thesubstrate and the metal pad, wherein the second passivation layer isformed by an uppermost dielectric layer of the dielectric layers of theinterconnection structure; and a third passivation layer disposedbetween the first passivation layer and the under bump metallurgy layer,wherein the third passivation layer has a second opening to expose aportion of the metal pad exposed from a first opening of the firstpassivation layer, wherein the first and second passivation layerscomprise oxide, nitride, oxynitride, and wherein the third passivationlayer comprises polyimide.
 2. The semiconductor package as claimed inclaim 1, further comprises a conductive bump disposed on the additionalunder bump metallurgy layer, wherein the conductive pillar is disposedbetween the additional under bump metallurgy layer and the conductivebump.
 3. The semiconductor package as claimed in claim 2, furthercomprises a solder, wherein the solder covers the passive device.
 4. Thesemiconductor package as claimed in claim 3, wherein the conductive bumpand the solder are at the same level.
 5. The semiconductor package asclaimed in claim 1, wherein the under bump metallurgy covers the metalpad exposed from the first opening, extending over the first passivationlayer.
 6. The semiconductor package as claimed in claim 1, wherein thepassive device has two terminals respectively connected to the metal padand an additional metal pad disposed on the top of the interconnectionstructure.
 7. The semiconductor package as claimed in claim 1, whereinthe passive device is formed of copper.
 8. The semiconductor package asclaimed in claim 1, wherein the under bump metallurgy fully overlapswith the passive device.
 9. The semiconductor package as claimed inclaim 1, wherein the passive device comprises a connecting segmentcrossing with a portion of the passive device.
 10. The semiconductorpackage as claimed in claim 9, wherein the connecting segment is formedby an uppermost metal layer of the metal layers of the interconnectionstructure.
 11. The semiconductor package as claimed in claim 1, whereinthe copper pillar comprises an inductor or an antenna.
 12. Asemiconductor package, comprising: a substrate; a first passivationlayer disposed on the substrate; an under bump metallurgy layer disposedon the first passivation layer; an additional under bump metallurgylayer disposed on the first passivation layer, isolated from the underbump metallurgy layer; a conductive pillar disposed on the additionalunder bump metallurgy layer; a passive device separated from theconductive pillar and disposed on the under bump metallurgy layer; aninterconnection structure between the substrate and the firstpassivation layer, wherein the interconnection structure comprises aplurality of metal layers and a plurality of dielectric layers, whereinthe interconnection structure comprises a first metal pad and a secondmetal pad, each of which is formed by an uppermost metal layer of themetal layers of the interconnection structure, wherein a portion of thefirst passivation layer extends between a first end contacting the firstmetal pad and a second end contacting the second metal pad; a secondpassivation layer between the substrate and the uppermost metal layer ofthe metal layers of the interconnection structure, wherein the secondpassivation layer is formed by an uppermost dielectric layer of thedielectric layers of the interconnection structure; and a thirdpassivation layer disposed between the first passivation layer and theunder bump metallurgy layer, wherein a portion of the third passivationlayer extends between a third end contacting the first metal pad and afourth end contacting the second metal pad.
 13. The semiconductorpackage as claimed in claim 12, wherein the first and second passivationlayers comprise oxide, nitride, oxynitride, and wherein the thirdpassivation layer comprises polyimide.
 14. The semiconductor package asclaimed in claim 12, wherein the first metal pad is exposed from a firstopening of the first passivation layer and a second opening of the thirdpassivation layer.
 15. The semiconductor package as claimed in claim 14,wherein the under bump metallurgy covers the first metal pad exposedfrom the first opening and the second opening.
 16. The semiconductorpackage as claimed in claim 12, further comprises a conductive bumpdisposed on the additional under bump metallurgy layer, wherein theconductive pillar is disposed between the additional under bumpmetallurgy layer and the conductive bump.
 17. The semiconductor packageas claimed in claim 12, further comprises a solder, wherein the soldercovers the passive device.
 18. The semiconductor package as claimed inclaim 12, wherein the passive device has two terminals respectivelyconnected to the metal pad and an additional metal pad disposed on thetop of the interconnection structure.
 19. The semiconductor package asclaimed in claim 12, wherein the first and second passivation layerscomprise oxide, nitride, oxynitride, and wherein the third passivationlayer comprises polyimide.
 20. The semiconductor package as claimed inclaim 12, wherein the conductive bump and the solder are at the samelevel.